High-Density Plasma Etching of Low-Dielectric Constant Materials

High-Density Plasma Etching of Low-Dielectric Constant Materials

Author(s):

Standaert, T. E. F. M.

Publication title:

Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

511

Pub. Year:

1998

Page(from):

265

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994171 [1558994173]

Language:

English

Call no.:

M23500/511

Type:

Conference Proceedings

Details

TDL ID:	ZA00017529
Series ID:	PA00000011
Conf. info. (Name):	Symposium on low-dielectric constant materials
Conf. info. (Number):	4th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1998.04.14-1998.04.16

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