1.

Conference Proceedings

Conference Proceedings
Mason,M.E. ; Soper,R.A.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.729-738,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
2.

Conference Proceedings

Conference Proceedings
Mason,M.E. ; Soper,R.A. ; Terry,R.M. ; Mack,C.A.
Pub. info.: Optical Microlithography X.  pp.491-498,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
3.

Conference Proceedings

Conference Proceedings
Mason,M.E. ; Soper,R.A. ; Garza,C.M.
Pub. info.: Optical Microlithography IX.  Part2  pp.847-858,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726