Application of a plastic diaphragm for a silicon micropump
- Author(s):
- Kang,I.-B. ( Univ.of South Australia )
- Son,M.-T.
- Haskard,M.R.
- Samaan,N.D.
- Ju,B.-K.
- Publication title:
- Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3046
- Pub. Year:
- 1997
- Page(from):
- 148
- Page(to):
- 155
- Pub. info.:
- Bellingham: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424594 [0819424595]
- Language:
- English
- Call no.:
- P63600/3046
- Type:
- Conference Proceedings
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