1.

Conference Proceedings
Conference Proceedings
1. Three-Dimensional Oxidation Simulation with Elasto-Viscoplastic Model
Lee, J.-H. ; Son, M.-S. ; Hwang, H.-J
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.228-236,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4
2.

Conference Proceedings
Conference Proceedings
2. Three-Dimensional Monte Carlo Simulation of Implanted Boron and Damage Distribution in Crystalline Silicon Considering Mask Structure
Son, M.-S. ; Lee, J.-H. ; Byun, K.-R. ; Hwang, H.-J.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.496-508,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4