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11 results

Conference Proceedings

1. RADIATION DAMAGE INDUCED TRANSIENT ENHANCED DIFFUSION OF DOPANTS IN SILICON

Angelucci, R. ; Gabilli, E. ; Lotti, R. ; Negrini, P. ; Servidori, M. ; Solmi, S. ; Anderle, M.

Pub. info.:	Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.505-510, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	74

Conference Proceedings

2. As AND B ION IMPLANTATION THROUGH Mo AND INTO Mo-SILICIDE LAYERS FOR SHALLOW JUNCTION FORMATION

Angelucci, R. ; Merli, M. ; Solmi, S. ; Armigliato, A. ; Gabilli, E. ; Govoni, D. ; Poggi, A.

Pub. info.:	Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.751-758, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	157

Conference Proceedings

3. Effects of Interstitial Clustering on Transient-Enhanced Diffusion of Boron in Silicon

Solmi, S. ; Valmorri, S.

Pub. info.:	Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.65-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	439

Conference Proceedings

4. Formation of Counter Doped Shallow Junctions by Boron and Antimony Implantation and Codiffusion in Silicon

Solmi, S. ; Canteri, R.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.329-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

5. Transient Diffusion Effects of Sb and B in Si Induced by Medium- and High-Energy Implants of Si+ and As+ Ions

Lulli, G. ; Solmi, S. ; Bianconi, M. ; Napolitani, E. ; Carnera, A.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.193-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	568

Conference Proceedings

6. Effects of Interstitial Clustering on Transient Enhanced Diffusion of Boron in Silicon

Solmi, S. ; Valmorri, S.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.95-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

Conference Proceedings

7. Competition between Oxidation and Recrystallization in Ion Amorphized (0001) 6H-SiC

Poggi, A. ; Parisini, A. ; Solmi, S. ; Nipoti, R.

Pub. info.:	Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy. pp.665-668, 2005. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	483-485

Conference Proceedings

8. Indium in Silicon: A Study on Diffusion and Electrical Activation

Scalese, S. ; Magna, A. La ; Mannino, G. ; Privitera, V. ; Bersani, M. ; Giubertoni, D. ; Solmi, S. ; Pichler, P.

Pub. info.:	CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.205-210, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	765

Conference Proceedings

9. Characterization of a Thermal Oxidation Process on SiC Preamorphized by Ar Ion Implantation

Poggi, A. ; Nipoti, R. ; Solmi, S. ; Bersani, M. ; Vanzetti, L.

Pub. info.:	Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.1357-1360, 2004. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	457-460

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Conference Proceedings

10. Characterization of Al-Si ohmic contacts obtained on shallow junctions by laser and electron beam annealing

Armigliato, A. ; De Luca, P. ; Finetti, M. ; Solmi, S.

Pub. info.:	Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.329-336, 1981. New York. North Holland
Title of ser.:	Materials Research Society symposia proceedings
Ser. no.:	1

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Author: Solmi, S.