1.

Conference Proceedings

Conference Proceedings
Satoh,H. ; Someda,Y. ; Saitou,N. ; Kawasaki,K. ; Mizuno,K. ; Kadowaki,Y. ; Hoga,M. ; Soga,T.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.72-83,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
2.

Conference Proceedings

Conference Proceedings
Soga,T. ; Yang,M. ; Kato,T. ; Jimbo,T. ; Umeno,M.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1779-1784,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
3.

Conference Proceedings

Conference Proceedings
Nishikawa,H. ; Soga,T. ; Jimbo,T. ; Umeno,M.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1923-1926,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
4.

Conference Proceedings

Conference Proceedings
Saitoh,H. ; Soga,T. ; Kubo,S. ; Sanki,S. ; Hoga,M.
Pub. info.: Photomask and X-Ray Mask Technology V.  pp.269-278,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3412
5.

Conference Proceedings

Conference Proceedings
Arai,T. ; Sakamizu,T. ; Kasuya,K. ; Katoh,K. ; Soga,T. ; Saitoh,H. ; Shiraishi,H. ; Hoga,M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.281-288,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
6.

Conference Proceedings

Conference Proceedings
Arai,T. ; Sakamizu,Y. ; Soga,T. ; Satoh,H. ; Katoh,K. ; Shiraishi,H. ; Hoga,M.
Pub. info.: Photomask and X-Ray Mask Technology V.  pp.190-195,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3412