1.

Conference Proceedings
Conference Proceedings
1. Parametric monitoring for the SUMMiT V surface-micromachining process
Oliver,A.D. ; Tanner,D.M. ; Mani,S.S. ; Swanson,S.E. ; Helgesen,K.S. ; Smith,N.F.
Pub. info.: Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA.  pp.242-253,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4558
2.

Conference Proceedings
Conference Proceedings
2. Optical probe for micromachine performance analysis
Dickey,F.M. ; Holswade,S.C. ; Smith,N.F. ; Miller,S.L.
Pub. info.: Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California.  pp.52-61,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3008
3.

Conference Proceedings
Conference Proceedings
3. Development of characterization tools for reliability testing of micro-electro-mechanical system actuators
Smith,N.F. ; Eaton,W.P. ; Tanner,D.M. ; Allen,J.J.
Pub. info.: MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California.  pp.156-164,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3880
4.

Conference Proceedings
Conference Proceedings
4. Linkage design effect on the reliability of surface-micromachined microengines driving a load
Tanner,D.M. ; Peterson,K.A. ; Irwin,L.A. ; Tangyunyong,P. ; Miller,W.M. ; Eaton,W.P. ; Smith,N.F. ; Rodgers,M.S.
Pub. info.: Materials and Device Characterization in Micromachining.  pp.215-226,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3512
5.

Conference Proceedings
Conference Proceedings
5. Failure analysis of tungsten-coated polysilicon micromachined microengines
Walraven,J.A. ; Mani,S.S. ; Fleming,J.G. ; Headley,T.J. ; Kotula,P.G. ; Pimentel,A.A. ; Rye,M.J. ; Tanner,D.M. ; Smith,N.F.
Pub. info.: MEMS Reliability for Critical Applications.  pp.49-57,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4180
6.

Conference Proceedings
Conference Proceedings
6. Characterization techniques for surface-micromachined devices
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.: Micromachined Devices and Components IV.  pp.171-178,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
7.

Conference Proceedings
Conference Proceedings
7. First reliability test of a surface-micromachined microengine using SHiMMeR
Tanner,D.M. ; Smith,N.F. ; Bowman,D.J. ; Eaton,W.P. ; Peterson,K.A.
Pub. info.: Micromachined Devices and Components III.  pp.14-23,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224
8.

Conference Proceedings
Conference Proceedings
8. Characterization techniques for surface-micromachined devices
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.: Micromachined Devices and Components IV.  pp.431-438,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514