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43 results

Conference Proceedings

1. Using state-of-the-art hydrodynamic models to generate synthetic data cubes for imaging spectral sensing applications

Kao,C.-Y.J. ; Smith,W.S. ; Smith,B.W. ; Borel,C.C.

Pub. info.:	Imaging spectrometry VII : 1-3 August 2001, San Diego, USA. pp.216-224, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4480

Conference Proceedings

2. Materials for reflective multilayer coatings for EUV wavelengths

Smith,B.W. ; Venkataraman,P. ; Kurinec,S.K. ; Mackay,R.S.

Pub. info.:	Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.544-554, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3331

Conference Proceedings

3. Revalidation of the Rayleigh resolution and DOF limits

Smith,B.W.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.142-153, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

4. Variations to the influence of lens aberration invoked with PSM and OAI

Smith,B.W.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part1 pp.330-346, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

5. IRISHS:the infrared imaging spatial heterodyne spectrometer:a new pushbroom Fourier transform ultraspectral imager with no moving parts

Smith,B.W. ; Laubscher,B.E. ; Cooke,B.J. ; LaDelfe,P.C. ; Harlander,J.M. ; Howard,J.W. ; Milligan,S.

Pub. info.:	Infrared technology and applications XXV : 5-9 April 1999, Orlando, Florida. pp.501-509, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3698

Conference Proceedings

6. Customized off-axis illumination aperture filtering for sub-0.18-ｦﾌm KrF Lithography

Hsia,C.-C. ; Gau,T.-S. ; Yang,C.-H. ; Liu,R.-C. ; Chang,C.-H. ; Chen,L.-J. ; Wang,C.-M. ; Chen,J.F. ; Smith,B.W. ; Hwang,G.-W. ; Lay,J.-W. ; Goang,D.-Y.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part1 pp.427-434, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

7. Resolution and DOF improvement through the use of square-shaped illumination

Smith,B.W. ; Zavyalova,L. ; Smith,S.G. ; Petersen,J.S.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part1 pp.408-419, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

8. Multiframe enchancement of FLIR and infrared seeker images

Smith,B.W.

Pub. info.:	Infrared imaging systems : design, analysis, modeling, and testing IX : 15-16 April 1998, Orlando, USA. pp.231-239, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3377

Conference Proceedings

9. Masking materials for 157-nm lithography

Smith,B.W. ; Bourov,A. ; Lassiter,M. ; Cangemi,M.

Pub. info.:	19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California. Part1 pp.412-420, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3873

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Conference Proceedings

10. Spatial frequency filtering in the pellicle plane

Smith,B.W. ; Kang,H.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part1 pp.252-265, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

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