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17 results

Conference Proceedings

1. Spatial Modulation of Electronic States in Nanoscopic Peapods.

Yazdani, A. ; Hombaker, Di. ; Khang, S.-J. ; Misra, S. ; Smith, B.W. ; Luzzi, D.E. ; Johnson, A.T. ; Mele, E.J.

Pub. info.:	Fullerenes : the exciting world of nanocages and nanotubes, proceedings of the International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters. pp.460-465, 2002. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-12

Conference Proceedings

2. MEMS-based precision motion control approach to high-throughput-rate electron beam lithgraphy

Chase, J.G. ; Smith, B.W.

Pub. info.:	Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.450-461, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4592

Conference Proceedings

3. Water immersion optical lithography for 45-nm node

Smith, B.W. ; Kang, H. ; Bourov, A. ; Cropanese, F. ; Fan, Y.

Pub. info.:	Optical Microlithography XVI. Part Two pp.679-689, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5040

Conference Proceedings

4. Challenges in high NA, polarization, and photoresists

Smith, B.W. ; Cashmore, J.S.

Pub. info.:	Optical Microlithography XV. Part One pp.11-24, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

Conference Proceedings

5. Forbidden pitch or duty-free: revealing the causes of across-pitch imaging differences

Smith, B.W.

Pub. info.:	Optical Microlithography XVI. Part One pp.399-407, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5040

Conference Proceedings

6. Aberration determination in early 157-nm exposure system

Smith, B.W. ; Conley, W. ; Garza, C.M. ; Meute, J. ; Miller, D.A. ; Rich, G.K. ; Graffenberg, V. ; Dean, K.R. ; Patel, S. ; Ford, A. ; Foster, J. ; Moers, M.H. ; Cummings, K.D. ; Webb, J.E. ; Dewa, P.G. ; Zerrade, A. ; McDonald, S.S. ; Hughes, G.P. ; Dirksen, P.

Pub. info.:	Optical Microlithography XV. Part Two pp.1635-1643, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

Conference Proceedings

7. Image enhancement through square illumination shaping

Smith, B.W. ; Vandenberghe, G.

Pub. info.:	Optical Microlithography XV. Part Two pp.1500-1503, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

Conference Proceedings

8. OPC and image optimization using localized frequency analysis

Smith, B.W. ; Ewbank, D.E.

Pub. info.:	Optical Microlithography XV. Part One pp.148-157, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4691

Conference Proceedings

9. Synthesis of projection lithography for low-k1 via interferometry

Cropanese, F.C. ; Bourov, A. ; Fan, Y. ; Estroff, A. ; Zavyalova, L.V. ; Smith, B.W.

Pub. info.:	Optical Microlithography XVII. pp.1836-1842, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5377

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Conference Proceedings

10. Gray assist bar OPC

Lafferty, N.V. ; Vandenberghe, G. ; Smith, B.W. ; Lassiter, M. ; Martin, P.M.

Pub. info.:	Optical Microlithography XVII. pp.381-392, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5377

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