1.

Conference Proceedings
Conference Proceedings
1. *LOW TEMPERATURE SYNTHESIS OF SILICON OXIDE AND OXYNITRIDE FILMS BY REACTIVE LASER ABLATION
Fogarassy, E. ; Fuchs, C. ; Slaoui, A. ; De Unamuno, S. ; Stoquert, J.-P. ; Marine, W. ; Lang, B.
Pub. info.: Laser ablation in materials processing : fundamentals and applications : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.319-330,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 285
2.

Conference Proceedings
Conference Proceedings
2. PHOSPHORUS AND BORON DOPING OF SILICON THIN FILMS USING ArF EXCIMER LASER
Slaoui, A. ; Pattyn, H. ; Fogarassy, E. ; De Unamuno, S. ; Stuck, R.
Pub. info.: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.389-396,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 236
3.

Conference Proceedings
Conference Proceedings
3. BORON DOPING OF SILICON USING EXCIMER LASERS
Slaoui, A. ; Foulon, F. ; Bianconi, M. ; Correra, L. ; Nipoti, R. ; Stuck, R. ; Unamuno, S. ; Fogarassy, E. ; Nicoletti, S.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.591-596,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
4.

Conference Proceedings
Conference Proceedings
4. ArF EXCIMER LASER DOPING INTO AMORPHOUS SILICON THIN FILMS
Elliq, M. ; Slaoui, A. ; Fogarassy, E. ; Pattyn, H. ; Struck, R. ; Siffert, P.
Pub. info.: Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.739-744,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 219
5.

Conference Proceedings
Conference Proceedings
5. STUDY OF Si02 FORMATION BY PLASMA TREATMENT OF SiO THIN FILMS
Perriere, J. ; Pelloie, B. ; Rochet, F. ; Fogarassy, E. ; Slaoui, A. ; Dufour, G. ; Roulet, H. ; Froment, M.
Pub. info.: SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A..  pp.85-90,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 105
6.

Conference Proceedings
Conference Proceedings
6. OPTICAL PROPERTIES OF LASER INDUCED HEAVILY DOPED SILICON LAYERS
Slaoui, A. ; Fogarassy, E. ; Siffert, P. ; Morphange, J. F. ; Balkanski, M.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.159-166,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
7.

Conference Proceedings
Conference Proceedings
7. RAPID THERMAL OXIDATION OF HEAVILY DOPED SILICON
Slaoui, A. ; Hartiti, B. ; Busch, M. C. ; Muller, J. C. ; Siffert, P.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.409-414,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
8.

Conference Proceedings
Conference Proceedings
8. Excimer laser induced crystallization of amorphous silicon-germanium films
Slaoui, A. ; Deng, C. ; Talwar, S. ; Kramer, J. K. ; Prevot, B. ; Sigmon, T. W.
Pub. info.: Crystallization and related phenomena in amorphous materials : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.689-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 321
9.

Conference Proceedings
Conference Proceedings
9. SHALLOW-JUNCTION FORMATION BY RAPID THERMAL DIFFUSION INTO SILICON FROM DOPED SPIN-ON GLASS FILMS
Ventura, L. ; Slaoui, A. ; Hartiti, B. ; Muller, J. C. ; Stuck, R. ; Siffert, P.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.345-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
10.

Conference Proceedings
Conference Proceedings
10. Rapid Isothermal Annealing of Doped and Undoped Spin-On Glass Films
Slaoui, A. ; Ventura, L. ; Lachiq, A. ; Monna, R. ; Muller, J. C.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.365-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387