1.

Conference Proceedings
Conference Proceedings
1. Overlay performance in advanced processes
Bornebroek,F. ; Burghoorn,J. ; Greeneich,J.S. ; Megens,H.J. ; Satriasaputra,D. ; Simons,G. ; Stalnaker,S. ; Koek,B.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.520-531,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Extended ATHENA alignment performance and application for the 100-nm technology node
Navarro,R. ; Keij,S. ; Boef,A.J.den ; Schets,S. ; Bilsen,F.van ; Simons,G. ; Schuurhuis,R. ; Burghoorn,J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.682-694,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344