1.

Conference Proceedings
Conference Proceedings
1. EXCIMER LASER INTERACTIONS WITH PTFE RELEVANT TO THIN FILM GROWTH
Dickinson, J. T. ; Norton, M. G. ; Shin, J. -J. ; Jiang, W. ; Langford, S. C.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.359-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
2.

Conference Proceedings
Conference Proceedings
2. Phase-defocus windows for alternating phase-shifting mask
Liang, F. -J. ; Chen, C. -K. ; Shin, J. -J. ; You, J. -W. ; Lin, C. -H. ; Pan, Z. -Y. ; Shu, K. -C. ; Gau, T. -S. ; Lin, B. J.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.406-415,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567