Evaluation of partial coherent imaging using the transfer function in immersion lithography [6154-103]
- Author(s):
Jung, M. R. ( Hanyang Univ.(South Korea) ) Kwak, E. A. ( Hanyang Univ.(South Korea) ) Oh, H.-K. ( Hanyang Univ.(South Korea) ) Shim, S.-B. ( Seoul National Univ. (South, Korea) ) Choi, N.-R. ( Seoul National Univ. (South, Korea) ) Kim, J.-S. ( Seoul National Univ. (South, Korea) ) - Publication title:
- Optical Microlithography XIX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6154
- Pub. Year:
- 2006
- Pt.:
- 2
- Page(from):
- 61542R
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461971 [0819461970]
- Language:
- English
- Call no.:
- P63600/6154
- Type:
- Conference Proceedings
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