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Evaluation of partial coherent imaging using the transfer function in immersion lithography [6154-103]

Author(s):
Jung, M. R. ( Hanyang Univ.(South Korea) )
Kwak, E. A. ( Hanyang Univ.(South Korea) )
Oh, H.-K. ( Hanyang Univ.(South Korea) )
Shim, S.-B. ( Seoul National Univ. (South, Korea) )
Choi, N.-R. ( Seoul National Univ. (South, Korea) )
Kim, J.-S. ( Seoul National Univ. (South, Korea) )
1 more
Publication title:
Optical Microlithography XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6154
Pub. Year:
2006
Pt.:
2
Page(from):
61542R
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461971 [0819461970]
Language:
English
Call no.:
P63600/6154
Type:
Conference Proceedings

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