1.

Conference Proceedings
Conference Proceedings
1. Improved characteristics of rainbow defects with novel wafer edge exposure technique
Shim, K.-C. ; Kim, M.-S. ; Lee, E.-S. ; Lee, C.-S. ; Gil, M.-G. ; Kim, B.-H. ; In, J.-S. ; Yoon, T.-B. ; Kim, J.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part Two  pp.919-926,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689
2.

Conference Proceedings
Conference Proceedings
2. Application of new thin BARC technology for KrF lithography at 80-nm node device
Kim, M.-S. ; Shim, K.-C. ; Kim, H.-J. ; Kwon, K.-S. ; Lee, H.-G. ; Lee, C.-S. ; Gil, M.-G. ; Song, Y.-W.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.724-728,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376