1.

Conference Proceedings
Conference Proceedings
1. Novel testing scheme for selection of capacitive fingerprint sensor LSIs
Shimamura, T. ; Morimura, H. ; Unno, H. ; Fujii, K. ; Shigematsu, S. ; Machida, K. ; Kyuragi, H.
Pub. info.: Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia.  pp.23-30,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4593
2.

Conference Proceedings
Conference Proceedings
2. Development of pellicle for F2(157-nm) excimer laser
Shigematsu, S. ; Nakano, T. ; Shigemoto, H. ; Kondo, M. ; Nakagawa, H. ; Sasaki, H. ; Higashikawa, I.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.606-616,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
3.

Conference Proceedings
Conference Proceedings
3. Development of pellicle for ArF excimer laser
Shigematsu, S. ; Kondo, M. ; Nakagawa, H.
Pub. info.: Photomask and X-Ray Mask Technology VI.  pp.166-176,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3748