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33 results

Conference Proceedings

1. Low On-Resistance in 4H-SiC RESURF JFETs Fabricated with Dry Process for Imptantation Metal Mask

Masuda, T. ; Fujikawa, K. ; Shibata, K. ; Tamaso, H. ; Hatsukawa, S. ; Tokuda, H. ; Saegusa, A. ; Namikawa, Y. ; Hayashi, H.

Pub. info.:	Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.1203-1206, 2006. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	527-529

Conference Proceedings

2. Effects of Thermal Processing on Photoluminescence of Si Nanocrystallites Prepared by Pulsed Laser Ablation

Umezu, I. ; Shibata, K. ; Yamaguchi, S. ; Sato, H. ; Sugimura, A. ; Y. Yamada ; T.Yoshida

Pub. info.:	Proceedings of the Fifth International Symposium on Quantum Confinement : nanostructures. pp.40-48, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-19

Conference Proceedings

3. Growth of Homogeneous and Gradient BCxNyFilms by PECVD Using Trimethylaminoborane Complex

Kosinova, M.L. ; Fainer, N.I. ; Rumyantsev, Yu.M. ; Maximovski, E.A. ; Kuznetsov, F.A. ; Terauchi, M. ; Shibata, K. ; Satoh, F.

Pub. info.:	Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium. pp.708-715, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-8

Conference Proceedings

4. Nanocrystalline SiCxNy films: RPECVD Synthesis and Transformation Under Thermal Annealing

Kuznetsov, F.A. ; Boronin, A.I. ; Koscheev, C.V. ; Terauchi, M. ; Shibata, K. ; Satoh, F.

Pub. info.:	Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium. pp.1086-1093, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-8

Conference Proceedings

5. Numerical simulation of magnetic reconnection associated with emerging flux in the solar atmosphere

Yokoyama, T. ; Shibata, K.

Pub. info.:	Fourth International Toki Conference on Plasma Physics and Controlled Nuclear Fusion : Satio Hayakawa Memorial Conference, 17-20 November, 1992, Toki, Japan : joint Varenna-Abastumani-ESA-Nagoya Workshop on Plasma Astrophysics. pp.203-206, 1993. Paris. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	351

Conference Proceedings

6. X-ray jets in the solar corona: observations with Yohkoh soft X-ray telescope

Shibata, K. ; SXT Team

Pub. info.:	Fourth International Toki Conference on Plasma Physics and Controlled Nuclear Fusion : Satio Hayakawa Memorial Conference, 17-20 November, 1992, Toki, Japan : joint Varenna-Abastumani-ESA-Nagoya Workshop on Plasma Astrophysics. pp.207-210, 1993. Paris. ESA Publications Division
Title of ser.:	ESA SP
Ser. no.:	351

Conference Proceedings

7. *ELECTRON-BEAM RECRYSTALLIZATION OF SILICON LAYERS ON SILICON DIOXIDE

Inoue, T. ; Shibata, K. ; Kato, K. ; Yoshii, T. ; Higashinakagawa, I. ; Taniguchi, K. ; Kashiwagi, M.

Pub. info.:	Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.523-532, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	23

Conference Proceedings

8. FARBRICATE OF THE LARGE-AREA INTEGRATED a-Si SOLAR CELLS

Yamazaki, S. ; Abe, M. ; Nagayama, S. ; Shibata, K. ; Susukida, M. ; Fukada, T. ; Kinka, M. ; Kobayashi, I. ; Inushima, T. ; Suzuki, K.

Pub. info.:	Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.487-492, 1986. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	70

Conference Proceedings

9. PE-CVD Chamber Cleaning Process Performance Observation Using Fluorocarbon Plasma Optical Emission

Suzuki, S. ; Wani, E. ; Sunada, T. ; Shibata, K. ; Morimura, T. ; Mitsui, Y. ; Kosano, Y. ; Takaichi, T. ; Beppu, T. ; Sekiya, A.

Pub. info.:	The global climate change : a coordinated response by electrochemistry and solid-state science and technology : proceedings of the first International Symposium. pp.231-241, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-20

10.

Conference Proceedings

10. Investigation Regarding Inductive Coupled Plasma Abatement Unit for C2F6 PECVD Cleaning Gas with Added Oxygen

Sunada, T ; Wani, E. ; Suzuki, S. ; Shibata, K. ; Kosano, Y. ; Mitsui, Y. ; Takaichi, T. ; Beppu, T. ; Sekiya, A.

Pub. info.:	The global climate change : a coordinated response by electrochemistry and solid-state science and technology : proceedings of the first International Symposium. pp.242-253, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-20

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