1.

Conference Proceedings

Conference Proceedings
Sasaki, Y. ; Maeda, J. ; Koishi, T. ; Hashimoto, K. ; Shibahara, K. ; Yokoyama, S. ; Miyazaki, S. ; Hirose, M.
Pub. info.: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications.  pp.207-213,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-36
2.

Conference Proceedings

Conference Proceedings
Imai, K. ; Maruyama, S. ; Suzuld, T. ; Kudo, T. ; Miyake, S. ; Ikeda, M. ; Abe, T. ; Masuda, S. ; Tanabe, A. ; Lee, J-W. ; Shibahara, K. ; Yokoyania, S. ; Qoka, H.
Pub. info.: Silicon-on-insulator technology and devices XI : proceedings of the international symposium.  pp.149-158,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-5
3.

Conference Proceedings

Conference Proceedings
Shibahara, K. ; Takeuchi, T. ; Saitch, T. ; Nishino, S. ; Matsunami, H.
Pub. info.: Novel refractory semiconductors : symposium held April 21-23, 1987, Anaheim, California, U.S.A..  pp.247-252,  1987.  Pittsburgh, Penn..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 97
4.

Conference Proceedings

Conference Proceedings
Shibahara, K. ; Nishino, S. ; Matsunami, H.
Pub. info.: Novel refractory semiconductors : symposium held April 21-23, 1987, Anaheim, California, U.S.A..  pp.183-188,  1987.  Pittsburgh, Penn..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 97
5.

Conference Proceedings

Conference Proceedings
Imai, K. ; Maruyama, S. ; Suzuki, T. ; Kudo, T. ; Miyake, S. ; Ikeda, M. ; Abe, T. ; Masuda, S. ; Tanabe, A. ; Lee, J.-W. ; Shibahara, K. ; Yokoyama, S. ; Ooka, H.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.493-502,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6