1.

Conference Proceedings
Conference Proceedings
1. COMPOUND FORMATION AND SILICON BEHAVIOR IN TITANIUM AND TANTALUM LAYERED ALUMINUM FILMS
Shen, B.W. ; Anthony, J.M. ; Chang, P.-H. ; Keenan, J. ; Matyi, R. ; Tsai, H.L.
Pub. info.: Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA.  pp.103-108,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 54
2.

Conference Proceedings
Conference Proceedings
2. THE STRUCTURES OF TANTALUM PENTOXIDE FILM FORMED BY REACTIVE DC MAGNETRON SPUTTER-DEPOSITION OF Ta
Chan, P-H. ; Bohlman, J.G. ; Liu, H.Y. ; Keenan, J.A. ; Shen, B.W. ; Chen, I-C.
Pub. info.: Better ceramics through chemistry III : symposium held April 5-8, 1988, Reno, Nevada, U.S.A..  pp.549-552,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 121
3.

Conference Proceedings
Conference Proceedings
3. THE EFFECTS OF ANNEALING TEMPERATURE ON THE CEARACTERISTICS OF BURIED OXIDE SILICON-ON-INSULATOR
Mao, B.-Y. ; Chang, P.-H. ; Lam, H.W. ; Shen, B.W. ; Keenan, J.A.
Pub. info.: Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A..  pp.251-256,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 53