1.

Conference Proceedings
Conference Proceedings
1. Characterization of Vanadium Oxide Films Prepared by Atmospheric Pressure Chemical Vapour Deposition
Vernardou, D. ; Pemble, M.E. ; Sheel, D. ; M Ivan, T.D. ; Parkin, P.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.1448-1454,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
2.

Conference Proceedings
Conference Proceedings
2. Near-Infrared Diode Laser In Situ Monitoring and Control of Chemical Vapor Deposition Processes
Martin, P.A. ; Holdsworth, R.J. ; Davis, M. ; Pemble, M.F. ; Sheel, D.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.176-182,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13