1.

Conference Proceedings
Conference Proceedings
1. In-plane optical measurement of vibrations of MEMS: gradient methods using interferometry and image processing
Cretin, B. ; Serio, B. ; Vairac, P.
Pub. info.: Microsystems Engineering: Metrology and Inspection III.  pp.161-168,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5145
2.

Conference Proceedings
Conference Proceedings
2. Stroboscopic illumination and synchronous imaging for the characterization of MEMS vibrations
Serio, B. ; Hunsinger, J. J. ; Cretin, B.
Pub. info.: Optical Micro- and Nanometrology in Manufacturing Technology.  pp.257-264,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5458
3.

Conference Proceedings
Conference Proceedings
3. Phase correlation method for subpixel in-plane vibration measurements of MEMS by stroboscopic microscopy [5856-113]
Serio, B. ; Hunsinger, J. J. ; Teyssieux, D. ; Cretin, B.
Pub. info.: Optical Measurement Systems for Industrial Inspection IV.  pp.755-762,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5856
4.

Conference Proceedings
Conference Proceedings
4. Close infrared thermography using an intensified CCD camera: application in nondestructive high resolution evaluation of electrothermally actuated MEMS [5856-117]
Serio, B. ; Hunsinger, J. J. ; Conseil, F. ; Derderian, P. ; Collard, D. ; Buchaillot, L. ; Ravat, M. F.
Pub. info.: Optical Measurement Systems for Industrial Inspection IV.  pp.819-829,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5856
5.

Conference Proceedings
Conference Proceedings
5. Thermal characterization of power transistors by close-infrared thermography method [6188-52]
Dhokkar, S. ; Serio, B. ; Hunsinger, J. J. ; Lagonotte, P.
Pub. info.: Optical Micro- and Nanometrology in Microsystems Technology.  pp.61881E-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6188