Comparison study between stepper (5x) and scanner (4x) for gate CD control using total process-proximity-based correction
- Author(s):
Nam,B.H. Kim,D.S. Cho,B.H. Seok,N.K. Jeong,J.K. Kim,S.P. Kang,S.W. Hwang,Y.J. Song,Y.J. - Publication title:
- 20th Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4186
- Pub. Year:
- 2000
- Page(from):
- 793
- Page(to):
- 800
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819438492 [0819438499]
- Language:
- English
- Call no.:
- P63600/4186
- Type:
- Conference Proceedings
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