DRY HYDROGEN PLASMA CLEANING FOR LOCAL EPITAXIAL GROWTH
- Author(s):
Ramm, Juergen Beck, Eugen Eisele, Ignaz Hansch, Walter Klepser, Bernd-Ulrich Senn, Hans - Publication title:
- Surface chemical cleaning and passivation for semiconductor processing
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 315
- Pub. Year:
- 1993
- Page(from):
- 91
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992139 [1558992138]
- Language:
- English
- Call no.:
- M23500/315
- Type:
- Conference Proceedings
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