Seidl, A. ; Fujii, K. ; Kiuchi, M. ; Satou, M. ; Takai, M.
Pub. info.:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.29-34, 1993. Pittsburgh, Pa.. Materials Research Society
Seidl, A. ; Mueller, G. ; Dornberger, E. ; Tomzig, E. ; Reyer, B. ; von Ammon, W.
Pub. info.:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.417-428, 1998. Pennington, NJ. Electrochemical Society