1.

Conference Proceedings

Conference Proceedings
Segal, A.S. ; Kondratyev, A.V. ; Galyskov, A.O. ; Kampov, S.Yu. ; Makarov, Yu.N. ; Sieberm, W. ; Siarek, P. ; Lowmy, S.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.456-463,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
2.

Conference Proceedings

Conference Proceedings
Mokhov, E.N. ; Roenkov, A.D. ; Vodakov, Yu.A. ; Karpov, S.Yu. ; Ramm, M.S. ; Segal, A.S. ; Makarov, Yu.A. ; Helava, H.
Pub. info.: Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden.  pp.979-982,  2003.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 433-436
3.

Conference Proceedings

Conference Proceedings
Segal, A.S. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu N.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.229-236,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13