1.

Conference Proceedings
Conference Proceedings
1. Comparison between organic spin-on BARC and carbon-containing CVD stack for 65-nm gate patterning
Jean-Damien Chapon ; Catherine Chaton ; Pascal Gouraud ; Marcel Broekaart ; Scott Warrick ; Isabelle Guilmeau ; Yorick Trouiller ; Jerome Belledent
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.708-719,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(2)
2.

Conference Proceedings
Conference Proceedings
2. Alignment robustness for 90 nm and 65 nm node through copper alignment mark integration optimization
Scott Warrick ; Paul Hinnen ; Rob Morton ; Kevin Cooper ; Pierre-Olivier Sassoulas ; Jerome Depre ; Ramon Navarro ; Richard van Haren ; Clyde Browning ; Doug Reber ; Henry Megens
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.854-864,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754