1.

Conference Proceedings

Conference Proceedings
Schulze,H.-J. ; Frohnmeyer,A. ; Niedernostheide,F.-J. ; Hille,F. ; Tutto,P. ; Pavelka,T. ; Wachutka,G.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  4218  pp.414-424,  2000.  Pennington, N.J., Bellingham, Wash..  Electrochemical Society — SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4218
2.

Conference Proceedings

Conference Proceedings
Schulze,H.-J. ; Deboy,G.
Pub. info.: Optical Characterization Techniques for High-P6rfo「nwic6 Microelectronic Device Manufacturing II.  pp.234-245,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2638
3.

Conference Proceedings

Conference Proceedings
Zoth,G. ; Geyer,S. ; Schulze,H.-J.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.5-20,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895
4.

Conference Proceedings

Conference Proceedings
Schulze,H.-J.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.271-288,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895