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13 results

Conference Proceedings

1. Printability study with polarization based AIMS fab 193i to investigate mask polarization effects [6281-11]

Zibold, A. ; Stroessner, U. ; Poortinga, E. ; Schmid, R. ; Scherubl, T ; Rosenkranz, N. ; Harnisch, W.

Pub. info.:	EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany. pp.628108-628108, 2006. Bellingham, Wash.,. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6281

Conference Proceedings

2. Investigation of Gas Phase Decomposition Mechanisms in GaN-CVD by Theoretical Methods: The 'Entropic Challenge'

Schmid, R. ; Wolbank, B. ; Basting, D.

Pub. info.:	Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium. pp.39-46, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-8

Conference Proceedings

3. GENETIC MODIFIED BACTERIORHODOPSIN FOR HOLOGRAPHIC INTERFEROMETRY

Hampp, N. ; Schmid, R. ; Zeisel, D.

Pub. info.:	Biomolecular materials by design : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.269-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	330

Conference Proceedings

4. Application results at 193nm: lithography emulation by aerial imaging and supplementary high resolution measurements

Zibold, A. M. ; Schmid, R. ; Bohm, K. ; Brunner, R. ; Durr, A. C.

Pub. info.:	EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany. pp.115-121, 2005. Bellingham, Wash.,. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5835

Conference Proceedings

5. Numerical assessment of new precursor in MOVPE process

Mukinovic, M. ; Brenner, G. ; Mesic, E. ; Schmid, R.

Pub. info.:	EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.152-159, 2005. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2005-09

Conference Proceedings

6. Theoretical determination of accurate entropy contributions by a monte carlo calculation of the partition function: Application to the decomposition of a single molecule precursor

Tafipolsky, M. ; Schmid, R.

Pub. info.:	EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.173-180, 2005. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2005-09

Conference Proceedings

7. The decomposition mechanism of a gallium azide single molecule precursor derived from accurate theoretical calculations

Schmid, R. ; Tafipolsky, M.

Pub. info.:	EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.103-110, 2005. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2005-09

Technical Paper

8. Advances in abradable coatings for gas turbines

Schmid, R. ; Nicoll, A. R.

Pub. info.:	A.S.M.E. paper. 1994. New York. The American Society of Mechanical Engineers
Title of ser.:	ASME Technical Paper : GT

Conference Proceedings

9. Aerial image measuring system at 193 nm: a tool-to-tool comparison and global CD mapping

Zibold, A. M. ; Schmid, R. ; Bohm, K. ; Birkner, R.

Pub. info.:	24th Annual BACUS Symposium on Photomask Technology. pp.1083-1090, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5567

10.

Conference Proceedings

10. Printability study with polarisation capable AIMS fab 193i to study polarisation effects [6152-92]

Zibold, A. ; Stroessner, U. ; Ridley, A. ; Scherubl, T. ; Rosenkranz, N. ; Harnisch, W. ; Poortinga, E. ; Schmid, R. ; Bekaert, J. ; Philipsen, V. ; Van Look, L.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XX. pp.61522F-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6152

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