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Process window OPC verification: dry versus immersion lithography for the 65 nm node [6154-169]

Author(s):
Borjon, A. ( Philips Semiconductors (France), Freescale Semicondutor (France), LETI-CEA (France), STMicroelectronics (France), and LTM-CNRS, CEA Grenoble (France) )
Belledent, J. ( Philips Semiconductors (France) )
Trouiller, Y. ( LETI-CEA (France) )
Lucas, K. ( Fresscale Semicondutor (France) )
Couderc, C. ( Philips Semiconductors (France) )
Sundermann, F. ( STMicroelectronics (France) )
Urbani, J. C. ( STMicroelectronics (France) )
Rody, Y. ( Philips Semiconductors (France) )
Gardin, G. ( Freescale, Semicondutor (France) )
Foussadier, F. ( STMicroelectronics (France) )
Schiavone, P ( LTM-CNRS, CEA Grenoble (France) )
6 more
Publication title:
Optical Microlithography XIX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6154
Pub. Year:
2006
Pt.:
3
Page(from):
61544D
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461971 [0819461970]
Language:
English
Call no.:
P63600/6154
Type:
Conference Proceedings

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