1.

Conference Proceedings

Conference Proceedings
Wolke, K. ; Schenkl, M. ; Alessandri, M. ; Bellandi, E.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.239-246,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings

Conference Proceedings
Bellandi, E. ; Alessandri, M. ; Tonti, A. ; Pipia, F. ; Wolke, K. ; Schenkl, M. ; Geomini, M. ; Kwakman, L.F.T.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.207-212,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
3.

Conference Proceedings

Conference Proceedings
Alessandri, M. ; Bellandi, E. ; Pipia, F. ; Crivelli, B. ; Wolke, K. ; Schenkl, M.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.523-527,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35