Lee, T. ; Schade, M. ; Merino, A. ; Lee, J. ; Christenson, C. ; Varker, C. ; Evans, K.
Pub. info.:
Materials reliability in microelectronics VIII : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.109-, 1998. Pittsburgh, Pa.. MRS - Materials Research Society
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.425-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society