1.

Conference Proceedings
Conference Proceedings
1. ESTIMATION OF ION IMPACT ENERGIES AND ELECTRODE SELF-BIAS VOLTAGE IN CAPACITIVE RF DISCHARGES
Savas, S. E.
Pub. info.: Plasma processing and synthesis of materials : symposium held April 21-23, 1987, Anaheim, California, U.S.A..  pp.35-40,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 98
2.

Conference Proceedings
Conference Proceedings
2. A METHOD FOR NON-INTRUSIVELY DETERMINING ION IMPACT CURRENT DENSITY AND ENERGY DISTRIBUTION IN CAPACITIVELY COUPLED RF PLASMAS
Savas, S. E.
Pub. info.: Plasma processing and synthesis of materials : symposium held April 21-23, 1987, Anaheim, California, U.S.A..  pp.61-66,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 98