1.

Conference Proceedings
Conference Proceedings
1. Overlay performance in advanced processes
Bornebroek,F. ; Burghoorn,J. ; Greeneich,J.S. ; Megens,H.J. ; Satriasaputra,D. ; Simons,G. ; Stalnaker,S. ; Koek,B.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.520-531,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Performance of a step-and-scan system for DUV lithography
Zwart,G.de ; Brink,M.A.van den ; George,R.A. ; Satriasaputra,D. ; Basselmans,J. ; Butler,H. ; Schoot,J.van ; Klerk,J.de
Pub. info.: Optical Microlithography X.  pp.817-835,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051