Silicon nitride ceramics : scientific and technological advances : symposium held November 30-December 3,1992, Boston, Massachusetts, U.S.A.. pp.429-434, 1993. Pittsburgh. Materials Research Society
Ito, T. ; Sugino, R. ; Sato, Y. ; Okuno, M. ; Osawa, A. ; Aoyama, T. ; Yamazaki, T. ; Arimoto, Y.
Pub. info.:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.195-206, 1992. Pittsburgh, Pa.. Materials Research Society
Onishi, Y. ; Sato, Y. ; Shiobara, E. ; Miyoshi, S. ; Matsuyama, H. ; Abe, J. ; Ichinose, H. ; Ohiwa, T. ; Nakano, Y. ; Yoshikawa, S. ; Hayase, S.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.205-213, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1319-1326, 1997. Pennington, NJ. Electrochemical Society
Ishii, H. ; Sato, Y. ; Kosugi, T. ; Arita, Y. ; Maeda, M.
Pub. info.:
Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.10-21, 1999. Pennington, N.J.. Electrochemical Society
Proceedings of the Symposium on Chemical and Biological Sensors and Analytical Electrochemical Methods. pp.1028-1038, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the fifth International Symposium on Redox Mechanisms and Interfacial Properties of Molecules of Biological Importance 1993. pp.299-310, 1993. Pennington, NJ. Electrochemical Society