1.

Conference Proceedings
Conference Proceedings
1. A methodology for the characterization of topography induced immersion bubble defects
Warrick, S. ; Hinnen, P. ; Morton, R. ; Cooper, K. ; Sassoulas, P.-O. ; Depre, J. ; Navarro, R. ; van Haren, R. ; Browning, C. ; Reber, D. ; Megens, H.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.154-163,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Mix and match capability of e-beam direct-write for the 65-nm technology
Laplanche, Y. ; Charpin, M. ; Pain, L. ; Todeschini, J. ; Henry, D. ; Sassoulas, P.-O. ; Gough, S. ; Weidenmueller, U. ; Hahmann, P.
Pub. info.: Emerging Lithographic Technologies VII.  1  pp.572-582,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5037
3.

Conference Proceedings
Conference Proceedings
3. Overlay metrology results on leading-edge Cu processes
Vachellerie, V. ; Ristoiu, D. ; Deleporte, A.G. ; Sassoulas, P.-O. ; Spinelli, P. ; Poulingue, M. ; Fabre, P. ; Arendt, R. ; Sundaram, G. ; Knutrud, P.C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.223-236,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689