Nguyen, P. ; Aulnette, C. ; Guiot, E. ; Daval, N. ; Bourdelle K.K. ; Cayrefourcq, I. ; Deguet, C. ; Sartori, S. ; Tauzin, A. ; Lagahe-Blanchard, C. ; Soubie, A.
Pub. info.:
Silicon-on-insulator technology and devices XII : proceedings of the international symposium. pp.185-190, 2005. Pennington, N.J.. Electrochemical Society
Moriceau, H. ; Rieutord, F. ; Morales, C. ; Sartori, S. ; Charvet, A.M.(Invited)
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.34-49, 2005. Pennington, NJ. Electrochemical Society
Lagahe-Blanchard, C. ; Sousbie, N. ; Sartori, S. ; Moriceau, H. ; Soubie, A. ; Aspar, B. ; Nguyen, P. ; Blondeau, B.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.346-367, 2003. Pennington, NJ. Electrochemical Society