1.

Conference Proceedings
Conference Proceedings
1. 19 Ultra-shallow junction formation by Gas Immersion Laser Doping (GILD) on silicon bulk and SOI substrate
Hernandez, M. ; Sarnet, T. ; Debarre, D. ; Boulmer, J. ; Kerrien, G. ; Laviron, C. ; Semeria, M N.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.145-154,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14
2.

Conference Proceedings
Conference Proceedings
2. 17 Laser thermal processing for ultra-shallow junction formation: experiment and modelling
Venturini, J. ; Hernandez, M ; Sarnet, T. ; Kerrien, G. ; Laviron, C. ; Santailler, J.L. ; Boulmer, J.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.131-136,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14
3.

Conference Proceedings
Conference Proceedings
3. X-ray Diffraction Characterization of Suspended Structures for MEMS Applications
Goudeau, P. ; Tamura, N. ; Lavelle, B. ; Rigo, S. ; Masri, T. ; Bosseboeuf, A. ; Sarnet, T. ; Petit, J. -A. ; Desmarres, J. -M.
Pub. info.: Thin films : stresses and mechanical properties XI : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.121-126,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 875
4.

Conference Proceedings
Conference Proceedings
4. Experiment and Modelization Results on Laser Thermal Processing for Ultra-Shallow Junction Formation: Influence of Laser Pulse Duration
Venturini, J. ; Hernandez, M. ; Zahorski, D. ; Kerrien, G. ; Sarnet, T. ; Debarre, D. ; Boulmer, J. ; Laviron, C. ; Semeria, M. -N. ; Camel, D. ; Santailler, J. -L.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.255-260,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
5.

Conference Proceedings
Conference Proceedings
5. Laser doping for microelectronics and microtechnology
Sarnet, T. ; Kerrien, G. ; Yaakoubi, N. ; Bosseboeuf, A. ; Dufour-Gergam, E. ; Debarre, D. ; Boulmer, J. ; Kakushima, K. ; Laviron, C. ; Hernandez, M. ; Venturini, J. ; Bourouina, T.
Pub. info.: High-Power Laser Ablation V.  pp.669-680,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5448