Chang, J.P. ; Case, C.B. ; Krautter, H.W. ; Sapjeta, J. ; Opila, R.L. ; Decker, M.A.
Pub. info.:
Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.261-269, 1999. Pennington, N.J.. Electrochemical Society
Weldon, M.K. ; Marsico, V.E. ; Chabal, Y.J. ; Agarwal, A. ; Eaglesham, D.J. ; Sapjeta, J. ; Brown, W.L. ; Jacobson, D.C. ; Caudano, Y. ; Christman, S.B. ; Chaban, E.E.
Pub. info.:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.229-248, 1997. Pennington, NJ. Electrochemical Society
Chang, J.P. ; Sapjeta, J. ; Rosamilia, J.M. ; Boone, T. ; Eng, J., Jr. ; Opila, R.L. ; Brennan, S. ; Wiemer, C. ; Pianetta, P.
Pub. info.:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.17-24, 1999. Pennington, NJ. Electrochemical Society
Chang, J.P. ; Eng, J., Jr. ; Sapjeta, J. ; Opila, R.L. ; Cox, P. ; Pianetta, P.
Pub. info.:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.129-136, 1999. Pennington, NJ. Electrochemical Society
Ma, Y. ; Chen, Y.N. ; Brown, M.M ; Li, F. ; Chen, Y. ; Eng, J., Jr. ; Opila, R.L. ; Chabal, Y.J. ; Sapjeta, J. ; Muller, D.A. ; Xing, G.C. ; Trowbridge, T. ; Khau, M. ; Tam, N.
Pub. info.:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium. pp.179-186, 2000. Pennington, NJ. Electrochemical Society
Rosamilia, J. M. ; Boone, T. ; Sapjeta, J. ; Raghavachari, K. ; Higashi, G. S. ; Liu, Q.
Pub. info.:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.181-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Windt, D. L. ; Torre, J. Dalla ; Gilmer, G. H. ; Sapjeta, J. ; Kalyanaraman, R. ; Baumann, F. H. ; O'Sullivan, P. L. ; Dunn, D. ; Hull, R.
Pub. info.:
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.307-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Sapjeta, J. ; Green, M. L. ; Chang, J. P. ; Silverman, P. J. ; Sorsch, T. W. ; Weir, B. E. ; Gladden, W. ; Ma, Y. ; Sung, C. Y. ; Lennard, W. N.
Pub. info.:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.289-, 1999. Warrendale, PA. MRS - Materials Research Society
Baumann, F. H. ; DallaTorre, J. ; Dunn, D. ; Gilmer, G. H. ; Hull, R. ; Kalyanaraman, R. ; O'Sullivan, P. L. ; Sapjeta, J. ; Windt, D. L.
Pub. info.:
Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A.. pp.263-268, 1999. Warrendale, PA. Materials Research Society
Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.355-369, 1994. Pennington, NJ. Electrochemical Society