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33 results

Conference Proceedings

1. Gettering technologies in advanced low temperature process

Sano, M. ; Ohgushi, S. ; Sadamitsu, S. ; Tsuya, H.

Pub. info.:	Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.281-294, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-22

Conference Proceedings

2. REDUCTION OF GROWN-IN DEFECTS BY HIGH TEMPERATURE ANNEALING

Adachi, N. ; Hisatomi, T. ; Sano, M. ; Tsuya, H.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.698-706, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(1)

Conference Proceedings

3. OXYGEN PRECIPITATION BEHAVIOR IN SILICON DURING CZOCHRALSKI CRYSTAL GROWTH

Hourai, M. ; Nagashima, T. ; Kajita, E. ; Miki, S. ; Sumita, S. ; Sano, M. ; Shigematsu, T.

Pub. info.:	Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.156-167, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-10

Conference Proceedings

4. GETTERING TECHNIQUES OF HEAVY METAL IMPURITIES IN SILICON

Sano, M. ; Sumita, S. ; Shigematsu, T. ; Fujino, N.

Pub. info.:	Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.784-795, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-10

Conference Proceedings

5. RADIAL DISTRIBUTION OF THERMALLY-INDUCED DEFECTS IN HEAVILY BORON-DOPED SILICON WAFERS

Asayama, E. ; Ono, T. ; Takeshita, M. ; Hourai, M. ; Sano, M. ; Tsuya, H.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.546-556, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(1)

Conference Proceedings

6. AFM OBSERVATION OF Si (100) SURFACE AFTER HYDROGEN ANNEALING AND WET CHEMICAL PROCESSING

Yanase, Y. ; Horie, H. ; Oka, Y. ; Sano, M. ; Sumita, S. ; Shigematsu, T.

Pub. info.:	Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.546-553, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-7

Conference Proceedings

7. Intrinsic Gettering of Nickel and Copper for Advanced Low-Temperature Device Processes

Ogushi, S. ; Reilly, N. ; Sadamitsu, S. ; Koike, Y. ; Sano, M.

Pub. info.:	Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.227-, 1998. Warrendale, Pa. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	510

Conference Proceedings

8. Formation of mesoscopic polymer dots by rubbing transfer

Sano, M. ; Okamura, J. ; Shinkai, S.

Pub. info.:	Organic/inorganic hybrid materials II : symposium held April 5-9, 1999, San Francisco, California, U.S.A.. pp.155-, 1999. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	576

Conference Proceedings

9. Investigation of the Effect of Thermal History on Ring-OSF Formation in CZ-Silicon Crystals

Kelly, G. P. ; Hourai, M. ; Umeno, S. ; Sano, M. ; Tsuya, H.

Pub. info.:	Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.21-, 1998. Warrendale, Pa. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	510

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Conference Proceedings

10. Synthesis of [Ca2(Co1-xCux)2O4]yCoO2 Single Crystals and Their Intrinsic Properties

Suzuki, M. ; Horii, S. ; Sano, M. ; Fujie, K. ; Otzschi, K. ; Shimoyama, J. ; Kishio, K.

Pub. info.:	Solid-State Chemistry of Inorganic Materials IV : symposium held December 2-6, 2002, Boston, Massachusetts, U.S.A.. pp.375-380, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	755

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