Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA. pp.465-470, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.314-325, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Dean, R. ; Malhotra, V.K. ; King, N. ; Sanie, M. ; MacDonald, S.S. ; Jordan, J.D. ; Hirukawa, S.
Pub. info.:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA. pp.197-204, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Pramanik, D. ; Kamberian, H.H. ; Progler, C.J. ; Sanie, M. ; Pinto, D.
Pub. info.:
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA. pp.142-152, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering