1.

Conference Proceedings

Conference Proceedings
Lei, J.J. ; Sanie, M. ; Lay, D.K.H.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.465-470,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings

Conference Proceedings
Ghosh, P. ; Kang, C. ; Sanie, M. ; Huckabay, J.A.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.314-325,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
3.

Conference Proceedings

Conference Proceedings
Dean, R. ; Malhotra, V.K. ; King, N. ; Sanie, M. ; MacDonald, S.S. ; Jordan, J.D. ; Hirukawa, S.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.197-204,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
4.

Conference Proceedings

Conference Proceedings
Pramanik, D. ; Kamberian, H.H. ; Progler, C.J. ; Sanie, M. ; Pinto, D.
Pub. info.: Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA.  pp.142-152,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5043