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16 results

Conference Proceedings

1. Pupil optimization of incoherent imaging systems for improved CD linearity

Ivonin, I. ; Sandstrom, T.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1792-1799, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Technical Paper

2. Flow Topology About an Orbiter Leading Edge Cavity at STS-107 Reentry Conditions

Brown , J. ; Tobak, M. ; Prabhu, D. ; Sandstrom, T.

Pub. info.:	AIAA meeting papers on disc. 2004. [Reston, Va.]. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA Thermophysics Conference
Ser. no.:	37th

Conference Proceedings

3. Pupil and illuminator optimization in partially coherent imaging systems [6154-148]

Ivonin, I. ; Sandstrom, T.

Pub. info.:	Optical Microlithography XIX. pp.61543U-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

Conference Proceedings

4. Gray scaling in high performance mask making [5853-94]

Martinsson, H. ; Sandstrom, T.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XII. pp.1031-1043, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5853

Conference Proceedings

5. Gray scaling in high performance optical pattern generators [5992-30]

Martinsson, H. ; Sandstrom, T. ; Rockwell, B.

Pub. info.:	25th Annual BACUS Symposium on Photomask Technology. pp.59920T-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5992

Conference Proceedings

6. SLM lithography: printing down to kl=O.30 without previous OPC processing [6154-71]

Sandstrom, T. ; Ivonin, I.

Pub. info.:	Optical Microlithography XIX. pp.61541Y-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

Conference Proceedings

7. Transparent corner enhancement scheme for a DUV pattern generator

Martinsson, H. ; Hellgren, J. ; Eriksson, N. ; Bjuggren, M. ; Sandstrom, T.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology X. pp.297-308, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5130

Conference Proceedings

8. Laser PG performance for 100-nm photomasks

Rosling, M. ; Karawajczyk, A. ; Askebjer, P. ; Zerne, R. ; Carroll, A.M. ; Eklund, R. ; Fosshaug, H. ; Sandstrom, T.

Pub. info.:	22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.759-766, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4889

Conference Proceedings

9. Resolution extensions in the Sigma7000 imaging paftern generator

Sandstrom, T. ; Eriksson, N.

Pub. info.:	22nd Annual BACUS Symposium on Photomask Technology. Part One pp.157-167, 2002. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4889

10.

Conference Proceedings

10. RET for optical maskless lithography

Sandstrom, T. ; Martinsson, H.

Pub. info.:	Optical Microlithography XVII. pp.1750-1763, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5377

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Author: Sandstrom, T.