1.

Conference Proceedings
Conference Proceedings
1. Improved Shallow Trench Isolation Process for Sub-Quarter-Micron CMOS Technologies
Sallagoity, P. ; Gaillard, F. ; Rivoire, M. ; Paoli, M. ; Brouquet, P. ; Haond, M. ; McClathie, S. ; Beekmann, K. ; Kiermasz, A. ; Dobson, C.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.453-466,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
2.

Conference Proceedings
Conference Proceedings
2. Arsenic-Only Preamorphization Process Extension for TiSi2 Formation Down to 65-nm Gate Lengths
Losavio, A. ; Sallagoity, P.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.71-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564