1.

Conference Proceedings

Conference Proceedings
Sugino, R. ; Tada, Y. ; Ito, T. ; Okui, Y. ; Sakuma, J.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.328-335,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings

Conference Proceedings
Tamaki, Y. ; Sekita, H. ; Takasago, K. ; Sumiyoshi, T. ; Sakuma, J.
Pub. info.: Commercial and biomedical applications of ultrafast lasers IV : 27-29 January 2004, San Jose, California, USA.  pp.1-3,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5340
3.

Conference Proceedings

Conference Proceedings
Sakuma, J. ; Okui, Y. ; Miyazawa, H. ; Inoue, F. ; Miyajima, M.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.245-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
4.

Conference Proceedings

Conference Proceedings
Ozono, K. ; Obara, M. ; Sakuma, J.
Pub. info.: Commercial and biomedical applications of ultrafast lasers III : 28-30 January 2003, San Jose, California, USA.  pp.208-213,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4978
5.

Conference Proceedings

Conference Proceedings
Sakuma, J. ; Okada, Y. ; Sumiyoshi, T. ; Sekita, H. ; Obara, M.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.599243-599243,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992