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16 results

Conference Proceedings

1. Design and development of next-generation bottom anti-reflective coatings for 45.nm process with hyper NA lithography [6153-96]

Nakajima, M. ; Sakaguchi, T. ; Hashimoto, K. ; Sakamoto, R. ; Klshioko, T. ; Takei, S. ; Enomoto, T. ; Nakajima, Y.

Pub. info.:	Advances in Resist Technology and Processing XXIII. pp.61532L-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6153

Conference Proceedings

2. Effect of the traffic shaping function of the EF class in a DiffServ queue architecture

Kawabata, A. ; Sakaguchi, T. ; Yamamoto, S. ; Shimizu, S. ; Nishikido, J. ; Komura, H.

Pub. info.:	Optical switching and optical interconnection II : APOC 2002 : Asia-Pacific Optical and Wireless Communications : 16-18 October, 2002, Shanghai, China. pp.118-125, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4907

Conference Proceedings

3. Development and evaluation of a large-area selenium-based flat-panel detector for real-time radiography and fluoroscopy

Tsukamoto, A. ; Yamada, S. ; Tomisaki, T. ; Tanaka, M. ; Sakaguchi, T. ; Asahina, H. ; Suzuki, K. ; Ikeda, M.

Pub. info.:	Medical Imaging 1999: Physics of Medical Imaging. pp.14-23, 1999. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3659

Conference Proceedings

4. The evaluation of particle counting efficacy of the new optical scattering method detecting the fluorescence for the particle number concentration standard in liquid [5856-129]

Sakaguchi, T. ; Ehara, K.

Pub. info.:	Optical Measurement Systems for Industrial Inspection IV. pp.994-1002, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5856

Conference Proceedings

5. Multi-layer resist system for 45-nm-node and beyond: Part II [6349-121]

Fujimura, Y. ; Morimoto, J. ; Manoshiro, A. ; Shimizu, M. ; Takamizawa, H. ; Hashimoto, M. ; Shiratori, H. ; Horii, K. ; Yokoya, Y. ; Ohkubo, Y. ; Enomoto, T. ; Sakaguchi, T. ; Nagai, M.

Pub. info.:	Photomask Technology 2006. pp.634936-634936, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6349

Conference Proceedings

6. SYNTHESIS OF PbS SEMICONDUCTOR MICROCRYSTALLITES IN SITU REVERSE MICELLES

Sanctis, O. de ; Kadono, K. ; Tanaka, H. ; Sakaguchi, T.

Pub. info.:	Microcrystalline and nanocrystalline semiconductors : Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.253-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	358

Conference Proceedings

7. Reactive Ion-Beam Etching of GaN Grown by MOVPE

Saotome, K. ; Matsutani, A. ; Shirasawa, T. ; Mori, M. ; Honda, T. ; Sakaguchi, T. ; Koyama, F. ; Iga, K.

Pub. info.:	III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.1029-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	449

Conference Proceedings

8. Characteristic Temperature Estimation of GaN-Based Lasers

Honda, T. ; Kawanishi, H. ; Sakaguchi, T. ; Koyama, F. ; Iga, K.

Pub. info.:	GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.. pp.G6.2.1-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	537

Conference Proceedings

9. Material design for immersion lithography with high refractive index fluid (HIF)

Kim, M. ; Kim, H. ; Shim, K. ; Jeon, J. ; Gil, M. ; Song, Y. ; Enomoto, T. ; Sakaguchi, T. ; Nakajima, Y.

Pub. info.:	Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.10-19, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5753(1)

10.

Conference Proceedings

10. Study on distinction of particles and bubbles for particle counting in liquids by the use fluorescence

Sakaguchi, T. ; Ehara, K.

Pub. info.:	Optical Measurement Systems for Industrial Inspection III. pp.855-863, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5144

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