1.

Conference Proceedings

Conference Proceedings
Safvi, S.A. ; Mountziaris, T.J.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.157-164,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
2.

Conference Proceedings

Conference Proceedings
Safvi, S.A. ; Thon, A. ; Redwing, J.M. ; Tischler, M.E. ; Kuech, T.F.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.119-124,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5