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15 results

Conference Proceedings

1. *DEFECT STRUCTURES AND ELETRICAL BEHAVIOR OF RAPID THERMALLY ANNEALED ION IMPLANTED SILICON

Sadana, D. K.

Pub. info.:	Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.319-328, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	92

Conference Proceedings

2. DYNAMIC ANNEALING PHENOMENA AND THE ORIGIN OF RTA-INDUCED “HAIRPIN" DISLOCATIONS

Maszara, W. ; Sadana, D. K. ; Rozgonyi, G. A. ; Sands, T. ; Washburn, J. ; Wortman, J. J.

Pub. info.:	Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A.. pp.277-286, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	35

Conference Proceedings

3. SHALLOW DOPING OF GALLIUM ARSENIDE BY RECOIL IMPLANTATION

Sadana, D. K. ; de Souza, J. P. ; Rutz, R. F. ; Cardone, F. ; Norcott, M. H.

Pub. info.:	Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A.. pp.315-320, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	147

Conference Proceedings

4. GETTERING AND PRECIPITATION PHENOMENA IN SEMICONDUCTORS

Sadana, D. K.

Pub. info.:	Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.. pp.245-256, 1985. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	36

Conference Proceedings

5. STUDY OF METASTABLE Fe-W FILMS

Goltz, G. ; Fernandez, R. ; Nicolet, M.-A. ; Sadana, D. K.

Pub. info.:	Metastable materials formation by ion implantation : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.227-234, 1982. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	7

Conference Proceedings

6. INFLUENCE OF RAPID THERMAL ANNEALING OF SHALLOW BF2 IMPLATATION INTO PRE-AMORPHIZED SILICON

Maszara, W. ; Carter, C. ; Sadana, D. K. ; Liu, J. ; Ozguz, V. ; Wortman, J. ; Rozgonyi, G. A.

Pub. info.:	Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.285-292, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	23

Conference Proceedings

7. GERMANIUM IMPLANTATION INTO SILICON: AN ALTERNATE PRE-AMORPHIZATION/RAPID THERMAL ANNEALING PROCEDURE FOR SHALLOW JUNCTION TECHNOLOGY

Sadana, D. K. ; Myers, E. ; Liu, J. ; Finstaad, T. ; Rozgonyi, G. A.

Pub. info.:	Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.303-308, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	23

Conference Proceedings

8. OXIDATION ENHANCED DIFFUSION OF Si AND Ge IN GaAs

Chang, J. C. P. ; Kavanagh, K. L. ; Cardone, F. ; Sadana, D. K.

Pub. info.:	Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.457-460, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	224

Conference Proceedings

9. HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY STUDY OF Se+ IMPALNATED AND ANNEALED GaAs

Sadana, D. K. ; Sands, T. ; Washburn, J.

Pub. info.:	Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.311-322, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	27

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Conference Proceedings

10. SHALLOW ION IMPLANTATION IN GALLIUM ARSENIDE MESFET TECHNOLOGY

de Souza, J. P. ; Sadana, D. K.

Pub. info.:	Advanced III-V compound semiconductor growth, processing and devices : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A.. pp.887-900, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	240

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Author: Sadana, D. K.