1.

Conference Proceedings
Conference Proceedings
1. Gettering technologies in advanced low temperature process
Sano, M. ; Ohgushi, S. ; Sadamitsu, S. ; Tsuya, H.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.281-294,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
2.

Conference Proceedings
Conference Proceedings
2. OBSERVATION OF RING-OSF NUCLEI IN CZ-Si USING SHORT TIME ANNEALING AND IR LIGHT SCATTERING TOMOGRAPHY
Marsden, K. ; Sadamitsu, S. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.684-694,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
3.

Conference Proceedings
Conference Proceedings
3. Oxygen Precipitation Behavior and its Optimum Condition for Internal Gettenng and Mechanical Strength in Epitaxial and Polished Silicon Wafers *
Sueoka, K. ; Akatsuka, M. ; Onno, T. ; Asayama, E. ; Koike, Y. ; Adachi, N. ; Sadamitsu, S. ; Katahama, H.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.164-179,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
4.

Conference Proceedings
Conference Proceedings
4. Intrinsic Gettering of Nickel and Copper for Advanced Low-Temperature Device Processes
Ogushi, S. ; Reilly, N. ; Sadamitsu, S. ; Koike, Y. ; Sano, M.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.227-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510