1.

Conference Proceedings

Conference Proceedings
Keller, J. ; Gollhardt, A. ; Vogel, D. ; Auerswald, E. ; Sabate, N. ; Auersperg, J. ; Michel, B.
Pub. info.: Residual stresses VII : ECRS 7 : proceedings of the 7th European conference on residual stresses, Berlin, Germany, 13-15 September 2006.  pp.121-128,  2006.  Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 524-525
2.

Conference Proceedings

Conference Proceedings
Sabate, N. ; Keller, J. ; Gollhardt, A. ; Vogel, D. ; Gracia, I. ; Cane, C. ; Morante, J. R. ; Michel, B.
Pub. info.: Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain.  pp.416-424,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5836
3.

Conference Proceedings

Conference Proceedings
Sabate, N. ; Gracia, I. ; Cane, C. ; Berganzo, J. ; Puicorbe, J. ; Morante, J.R.
Pub. info.: Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France.  pp.549-555,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4755
4.

Conference Proceedings

Conference Proceedings
Vogel, D. ; Sabate, N. ; Gollhardt, A. ; Keller, J. ; Auersperg, J. ; Michel, B.
Pub. info.: Testing, Reliability, and Application of Micro- and Nano-Material Systems IV.  pp.617505-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6175
5.

Conference Proceedings

Conference Proceedings
Sabate, N. ; Gracia, I. ; Cane, C. ; Puigcorbe, J. ; Cerda, J. ; Morante, J.R. ; Berganzo, J.
Pub. info.: Smart Sensors, Actuators, and MEMS.  1  pp.120-127,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5116
6.

Conference Proceedings

Conference Proceedings
Vogel, D. ; Lieske, D. ; Gollhardt, A. ; Keller, J. ; Sabate, N. ; Morante, J. R. ; Michel, B.
Pub. info.: Testing, Reliability, and Application of Micro- and Nano-Material Systems III.  pp.60-69,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5766