1.

Conference Proceedings

Conference Proceedings
Saavedra, A.F. ; Jones, K.S. ; Radic, L. ; Law, M.E. ; Chan, K.K.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.357-362,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
2.

Conference Proceedings

Conference Proceedings
Crosby, R.T. ; Jones, K.S. ; Law, M.E. ; Saavedra, A.F. ; Hansen, J.L. ; Larsen, A.N. ; Liu, J.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.183-188,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810