1.

Conference Proceedings
Conference Proceedings
1. Phase-shift mask metrology using scatterometry
S.M.G. Wilson ; H.M. Marchman ; S.S.H. Naqvi ; J.R. McNeil
Pub. info.: 14th annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California.  pp.305-315,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2322
2.

Conference Proceedings
Conference Proceedings
2. Metrology of etched quartz and chrome embedded phase shift gratings using scatterometry
S.M.G. Wilson ; S.S.H. Naqvi ; J.R. McNeil ; H.M. Marchman ; B.D. Johs
Pub. info.: Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California.  pp.479-494,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2439