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Conference Proceedings

1. Alternative technology for double patterning process simplification

H.-Y. Lim ; K.-Y. Jang ; J.-H. Kim ; S.-G. Lee ; S. Park

Pub. info.:	Lithography Asia 2008. 1 pp.714020-1-714020-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7140

Conference Proceedings

2. The effect of KOH and KOH/IPA etching on the surface roughness of the silicon mold used for polymer waveguide imprinting

S. An ; S.-G. Lee ; B.-H. O ; H.-H. Kim ; S.-G. Park

Pub. info.:	Optoelectronic integrated circuits X. pp.689717-1-689717-7, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6897

Conference Proceedings

3. Development of an internet-based water-1evel monitoring and measuring system using CCD camera

I. Shin ; J. Kim ; S.-G. Lee

Pub. info.:	ICMIT 2007, mechatronics, MEMS, and smart materials. 2 pp.67944Q-1-67944Q-6, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6794